Carbon Tetrafluoride CAS: 75-73-0 CF4 99.999% Hight Purity Chemical Specialty Gases 

Carbon Tetrafluoride CAS: 75-73-0 CF4 99.999%  Hight Purity Chemical Specialty Gases Product Usage Carbon tetrafluoride is an easily compressible gas with high volatility. It is one of the most stable organic compounds and is not easily soluble in water. When carbon tetrafluoride is burned with combustible gas,it will decompose to produce toxic fluoride. Carbon tetrafluoride has important applications in the microelectronics industry and other fields. It has been used maturely for many years as a dielectric material for etching silicon dioxide and silicon nitride. It is currently the largest plasma etching gas used in the microelectronics industry. Product parameter Carbon tetrafluoride（CF4）≥ Vol.% 99.999 Carbon dioxide（CO2）≤ Vol.ppm 1…